TMC Stacis 2100 Active Vibration Cancellation

TMC Stacis 2100 Active Vibration Cancellation

The world's most advanced active vibration cancellation system, ideal for the most sensitive instruments in noisy environments.

The system is primarily designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories but can be used in any environment that requires extremely high levels of vibration isolation.

Benefits

Increased throughput, quality and yield

Greater than 90% isolation at frequencies greater than 2 Hz, both vertical and horizontal – Increasing throughput, quality and yield.

Reduced fab floor construction costs

Allowing tools to be installed in higher vibration environments.

Minimal on-site compensation

Simple installation and robust control

Compatible with various floor heights

Employing advanced inertial vibration sensors and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by sensing floor vibration, then expanding and contracting piezoelectric actuators to filter out floor motion.

There is no "soft" suspension and, unlike active air systems, STACIS can be "stacked". This means that the STACIS systems don't suffer from the limitations of air systems, you can achieve even higher levels of vibration isolation across all frequencies.

Guaranteed to meet the floor vibration specifications of wafer inspection, metrology and microlithography tools.

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